Lecture language: English

Learning Goals

The lecture gives an introduction into the basics of microsystems technology. In the first part, methods for lithographic pattern transfer are summarized. Then specific techniques such as the LIGA process, micro-machining, and laser-patterning are explained and examples are given. Finally assembly and packaging methods are presented leading into a discussion of entire microsystems.

Content of teaching

•     Introduction in Nano- and Microtechnologies
•     Lithography
•     LIGA-technique
•     Mechanical microfabrication
•     Patterning with lasers
•     Assembly and packaging
•     Microsystems

Bibliography

M. Madou
Fundamentals of Microfabrication
Taylor & Francis Ltd.; Auflage: 3. Auflage. 2011