Dr. Martin Börner
Karlsruhe Institute of Technology
Institute of Microstructure Technology
Hermann-von-Helmholtz-Platz 1
76344 Eggenstein-Leopoldshafen
X-ray lithography: Responsible for equipment-related work, coordinator for the X-ray exposures
X-ray imaging: Responsible for the project on Hyperresolution gratings (HyReXPhI)