Dr. Martin Börner

Dr. Martin Börner

  • Karlsruhe Institute of Technology
    Institute of Microstructure Technology
    Hermann-von-Helmholtz-Platz 1
    76344 Eggenstein-Leopoldshafen

X-ray lithography: Responsible for equipment-related work, coordinator for the X-ray exposures
X-ray imaging: Responsible for the project on Hyperresolution gratings (HyReXPhI)