Development of thermal shape memory microactuators

Work's Description:

The demand on micro actuators tends to increase as a direct consequence of the progress in the field of microelectronics and its development is associated with high requirements for materials, design methods and technologies. The actuation based on shape memory alloys gained a large interest due to (unique) favorable down scaling behavior along with high energy densities as compared with conventional actuators. In this Hiwi position, different technical ways to prepare Ni-Ti-Cu films are discussed and their mechanical and actuation characteristics are investigated. Single-film prototype will be developed and performance tests will be conducted to explore the characterization of thermal micro actuators.

Scheduled work flow:

•    Characterization of material properties (structure, mechanical, thermal, magnetic)
•    Modelling, design and simulation (FEM Multiphysics, Lumped Element Modelling)
•    Rapid prototyping (Optical lithography, 3D Printing, laser technology)
•    Characterization of demonstrator variants (thermo-mechanical, electrical properties)
•    Design optimization

 

Fig. 1. Schematic diagram of thermal shape memory actuation cycle

 

To carry out the work, the IMT has extensive state-of-the-art equipment (600 m² clean room, rapid prototyping processes such as 3D printing and laser cutting, assembly and joining technology laboratories, various metrological laboratories). Intensive support ensures that the work can be carried out within the given time frame.

 

Fachliche/r Ansprechpartner/in

Dr. Jingyuan Xu
Karlsruher Institut für Technologie
Institut für Mikrostrukturtechnik
Postfach 3640
76021 Karlsruhe

Telefon: +49 721 608-2752
E-Mail: jingyuan.xu∂kit.edu