Dr. Franz-Josef Pantenburg
- X-ray lithography: Responsible for research activities
- Phone: +49 721 608-22600
- franz-josef pantenburg ∂does-not-exist.kit edu
Karlsruhe Institute of Technology
Institute of Microstructure Technology
Hermann-von-Helmholtz-Platz 1
76344 Eggenstein-Leopoldshafen