N. N.
- X-ray lithography: Responsible for research activities
Karlsruhe Institute of Technology
Institute of Microstructure Technology
Hermann-von-Helmholtz-Platz 1
76344 Eggenstein-Leopoldshafen
Karlsruhe Institute of Technology
Institute of Microstructure Technology
Hermann-von-Helmholtz-Platz 1
76344 Eggenstein-Leopoldshafen