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LIGA 1
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Institute of Microstructure Technology (IMT)
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Applied X-Ray Imaging System (XIS)
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Welcome to the IMT
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Research Groups
Lab on a Chip (LoC)
3D Photonic Integration (3PI)
Spin & Photon Applications (SPA)
Microstructures and Process Sensors (MPS)
Mold Inserts and Electroplating (EP)
Biomimetic Surfaces and Scanning Probe (BSS)
Advanced Nanofabrication (ANF)
Hybrid Solar Technologies (HST)
Luminescent Nanocrystals (LNC)
NMR - Micro Imaging and Spectroscopy (MIS)
Mikroaktor Systeme (MAS)
Teratronic Signal Processing (TSP)
Fluid Dynamic MRI (FDM)
Correlative X-ray Imaging (CXI)
Applied X-Ray Imaging System (XIS)
Hyperpolarisation (HYP)
Printed Nano Systems (PNS)
Spectroscopy for Metabolomic Signalling (SMS)
Low-cost MEMS (LCM)
Surfaces and High-Density Molecular Arrays (SHA)
Advanced Optics and Materials for next Gen PV (AMP)
Biological Model Systems (BMS)
Third Generation Photovoltaics (3GP)
Materials for Spectral Conversion (MSC)
Magnetic Resonance Automation (MRA)
Spin Dynamics (SDY)
Large-Scale Surface Structuring (LSS)
Zero-emission Thermal Technologies (ZET)
HiT-NMR
CORREL
Applied X-Ray Imaging System (XIS)
Projects
Team
Publications
LIGA Process
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N.
N.
Herrmann-von-Helmholtz-Platz 1
76344 Eggenstein-Leopoldshafen
Lectures:
X-Ray Optics
Introduction to Microsystem Technology - Practical Course
